Publication:

Study of submelt laser induced junction nonuniformities using Therma-Probe

Date

2010
Journal article
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Author(s)

Rosseel, Erik  
;
Bogdanowicz, Janusz  
;
Clarysse, Trudo
;
Vandervorst, Wilfried  
;
Ortolland, Claude
;
Hoffmann, Thomas Y.
;
Salnik, Alex
;
Nicolaides, Lena
;
Han, Sang-Hyun
;
Petersen, Dirch
;
Lin, Rong
;
Hansen, Ole

Journal

Journal of Vacuum Science and Technology B

Abstract

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1 since deposited on 2021-10-18
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1940 since deposited on 2021-10-18
Acq. date: 2026-02-28

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