Browsing by Author "Hansen, Steven G."
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Publication Empirical correlator for stochastic local CD uniformity in extreme ultraviolet lithography
; Hansen, Steven G.Journal article2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 3, p.Art. 033201Publication Progress in 157-nm resist performance and potential
Proceedings paper2002, Advances in Resist Technology and Processing XIX, 4/03/2002, p.512-521