Publication:

Empirical correlator for stochastic local CD uniformity in extreme ultraviolet lithography

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.3.033201
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.27 MB

Author(s)

De Bisschop, Peter  
;
Hansen, Steven G.

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

Description

Metrics

Downloads

98 since deposited on 2022-10-29
Acq. date: 2025-10-26

Views

1348 since deposited on 2022-10-29
Acq. date: 2025-10-26

Citations

Metrics

Downloads

98 since deposited on 2022-10-29
Acq. date: 2025-10-26

Views

1348 since deposited on 2022-10-29
Acq. date: 2025-10-26

Citations