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Browsing by Author "Hansen, T.M."

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    Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

    Petersen, D.H.
    ;
    Lin, R.
    ;
    Hansen, T.M.
    ;
    Rosseel, Erik  
    ;
    Vandervorst, Wilfried  
    ;
    Markvardsen, C.
    Journal article
    2008, Journal of Vacuum Science and Technology B, (26) 1, p.362-367

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