Browsing by Author "Hansen, Torben"
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Publication Review of electrical characterization of ultra-shallow junctions with micro four-point probes
;Petersen, Dirch ;Hansen, Ole ;Hansen, Torben ;Boggild, Peter ;Lin, RongKjaer, DanielJournal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C27-C1C33