Browsing by Author "Harned, Noreen"

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EUV lithography with the alpha demo tools: status and challenges

Harned, Noreen
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Goethals, Mieke
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Groeneveld, Rogier
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Kuerz, Peter
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Lowisch, Martin
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Meijer, Henk
Proceedings paper
2007, Emerging Lithographic Technologies XI, 27/02/2007, p.651706
Impact of an etched EUV mask black border on imaging and overlay

de Kruif, Rob
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Davydova, Natalia
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Connolly, Brid
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Fukugami, Norihito
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Lammers, Ad
Oral presentation
2012, International Symposium on Extreme Ultraviolet Lithography - EUVL
Performance of the full field EUV systems

Meiling, Hans
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Boon, Edwin
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Buzing, Nico
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Cummings, Kevin
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Frijns, Olav
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Galloway, Judy
Proceedings paper
2008, Emerging Lithographic Technologies XII, 24/02/2008, p.69210L