Browsing by Author "Harrar, D."
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Publication CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device
; ;Heck, J. ;Chou, T.K.A. ;Belov, N. ;Park, J.S. ;Harrar, D. ;Jain, A.Proceedings paper2009, Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21/06/2009, p.2409-2412