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Browsing by Author "Hashimoto, Kohei"

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    Reaction mechanisms of Sn-based polarity-change copolymer resists with different counter anions, designed for extreme ultraviolet lithography

    Hashimoto, Kohei
    ;
    Takata, Yui
    ;
    Muroya, Yusa
    ;
    Kozawa, Takahiro
    ;
    Machida, Kohei
    ;
    Enomoto, Satoshi
    Journal article
    2025-FEB 1, JAPANESE JOURNAL OF APPLIED PHYSICS, (64) 2

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