Browsing by Author "Hashimoto, Kohei"
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Publication Reaction mechanisms of Sn-based polarity-change copolymer resists with different counter anions, designed for extreme ultraviolet lithography
;Hashimoto, Kohei ;Takata, Yui ;Muroya, Yusa ;Kozawa, Takahiro ;Machida, KoheiEnomoto, SatoshiJournal article2025-FEB 1, JAPANESE JOURNAL OF APPLIED PHYSICS, (64) 2