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Browsing by Author "Hayashi, Shigenori"

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    Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS

    Kubicek, Stefan  
    ;
    Veloso, Anabela  
    ;
    Kottantharayil, Anil
    ;
    Hayashi, Shigenori
    Proceedings paper
    2005-04, Proceedings IEEE VLSI-TSA International Symposium on VLSI Technology, 25/04/2005, p.99-100
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    Scaling of Hf-based high-k dielectrics

    Heyns, Marc  
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    Beckx, Stephan  
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    Caymax, Matty  
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    Chen, J.
    ;
    Claes, Martine  
    ;
    Coenegrachts, Bart  
    Meeting abstract
    2004, International Workshop on Dielectric Thin Films for Future ULSI Devices, 26/05/2004, p.5-6

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