Publication:

Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS

Date

2005-04

Proceedings Paper

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Author(s)

Kubicek, Stefan

;

Veloso, Anabela

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Kottantharayil, Anil

;

Hayashi, Shigenori

;

Yamamoto, Kazuhiko

;

Mitsuhashi, Riichirou

;

;

;

;

;

;

;

De Gendt, Stefan

;

;

;

Biesemans, Serge

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1950 since deposited on 2021-10-16

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Acq. date: 2026-03-16