Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS

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Author(s)

Kubicek, Stefan

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Veloso, Anabela

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Kottantharayil, Anil

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Hayashi, Shigenori

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Yamamoto, Kazuhiko

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Mitsuhashi, Riichirou

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De Gendt, Stefan

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Biesemans, Serge

Metrics

1943 since deposited on 2021-10-16

Acq. date: 2025-10-23