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Browsing by Author "Heidarnia-Fathabad, Zahra"

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    Novel EUV mask absorber evaluation in support of next-generation EUV imaging

    Philipsen, Vicky  
    ;
    Luong, Vu  
    ;
    Opsomer, Karl  
    ;
    Detavernier, Christophe
    ;
    Hendrickx, Eric  
    Proceedings paper
    2018, Photomask Technology 2018, 17/09/2018, p.108100C

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