Novel EUV mask absorber evaluation in support of next-generation EUV imaging

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Author(s)

Philipsen, Vicky

;

;

;

Detavernier, Christophe

;

Hendrickx, Eric

;

Erdmann, Andreas

;

Evanschitzky, Peter

;

van de Kruijs, Robbert

;

Heidarnia-Fathabad, Zahra

;

;

Laubis, Christian

Metrics

2050 since deposited on 2021-10-26

Acq. date: 2025-10-24