Browsing by Author "Heinrich, P."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
Oral presentation2003, E-MRS Spring Meeting Symposium I: Functional Metal Oxides - Semiconductor StructuresPublication VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
Journal article2004, Materials Science & Engineering B, (109) 1_3, p.64-68