Browsing by Author "Heinrich, P."
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Publication Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
Oral presentation2003, E-MRS Spring Meeting Symposium I: Functional Metal Oxides - Semiconductor StructuresPublication VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
Journal article2004, Materials Science & Engineering B, (109) 1_3, p.64-68