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Articles
VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
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VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Boher, P.
;
Defranoux, C.
;
Heinrich, P.
;
Wolstenholme, J.
;
Bender, Hugo
Journal
Materials Science & Engineering B
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1922
since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations
Metrics
Views
1922
since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations