Publication:
VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1918 since deposited on 2021-10-15
Acq. date: 2025-10-25
Citations
Metrics
Views
1918 since deposited on 2021-10-15
Acq. date: 2025-10-25
Citations