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VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

Date

2004
Journal article
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dc.contributor.authorBoher, P.
dc.contributor.authorDefranoux, C.
dc.contributor.authorHeinrich, P.
dc.contributor.authorWolstenholme, J.
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-15T12:45:18Z
dc.date.available2021-10-15T12:45:18Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8605
dc.source.beginpage64
dc.source.endpage68
dc.source.issue1_3
dc.source.journalMaterials Science & Engineering B
dc.source.volume109
dc.title

VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

dc.typeJournal article
dspace.entity.typePublication
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