Browsing by Author "Hellin Rico, Raquel"
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Publication A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C
Journal article2007, Microsystem Technologies, (13) 11_12, p.1451-1456Publication Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS
Proceedings paper2004, Proceedings 15th Micromechanics Europe Workshop, 5/09/2004, p.115-118Publication Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid
Journal article2007, Journal of the Electrochemical Society, (154) 9, p.K74-K78Publication Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C
Hellin Rico, RaquelPHD thesis2010-02