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Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C
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1896 since deposited on 2021-10-18
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Acq. date: 2026-04-06
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1896 since deposited on 2021-10-18
2last month
2last week
Acq. date: 2026-04-06
Citations