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Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C
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1894 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-15
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1894 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-15
Citations