Browsing by Author "Hens, S."
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Publication Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy
Journal article2001, Materials Science in Semiconductor Processing, (4) 1_3, p.109-111Publication Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy
Oral presentation2000, International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced ChaPublication EFTEM analysis of the interaction of CO with a fluorinated organic dielectric
Proceedings paper2000, Proceedings EUREM 12, 9/07/2000, p.1325-1326Publication EFTEM as a porosity metrology tool for low-k dielectrics
Proceedings paper2002, Conference Book Joint Microscopy Meeting - JMM, 25/06/2002Publication EFTEM study of plasma etched low-k Si-O-C dielectrics
Proceedings paper2001, Microscopy of Semiconducting Materials - MSMXII, 25/03/2001, p.415-418Publication Grown-in lattice defects and diffusion in czochralski-grown germanium
Journal article2004, Defect and Diffusion Forum, 230-232, p.149-176Publication Quantitative EFTEM study of germanium quantum dots
Proceedings paper2001, Proceedings 5th Multinational Conference on Electron Microscopy; 20-25 September 2001; Lecce, Italy., p.345-346Publication Reliability of copper dual damascene influenced by pre-clean
; ; ; Proceedings paper2002, Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA, 8/07/2002, p.118-123