Browsing by Author "Henson, K."
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Publication Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices
Proceedings paper2004, Technical Digest International Electron Devices Meeting - IEDM, 13/12/2004, p.99-102Publication Implementation of high-K and metal gate materials for the 45nm node and beyond: gate patterning development
Oral presentation2004, Workshop on Dielectrics in Microelectronics - WODIM