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Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices
Publication:
Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Severi, Simone
;
Kottantharayil, Anil
;
Pawlak, Bartek
;
Duffy, Ray
;
Henson, K.
;
Lindsay, R.
;
Lauwers, Anne
;
Veloso, Anabela
;
de Marneffe, Jean-Francois
;
Ramos, Javier
;
Sijmus, Bram
;
Devriendt, Katia
;
Camillo-Castillo, A.
;
Eyben, Pierre
;
Vandervorst, Wilfried
;
Jurczak, Gosia
;
Biesemans, Serge
;
De Meyer, Kristin
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1997
since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations
Metrics
Views
1997
since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations