Publication:

Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices

Date

2004

Proceedings Paper

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Author(s)

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Kottantharayil, Anil

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Veloso, Anabela

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de Marneffe, Jean-Francois

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Devriendt, Katia

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Camillo-Castillo, A.

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Vandervorst, Wilfried

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Biesemans, Serge

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De Meyer, Kristin

Statistics

2004 since deposited on 2021-10-15

2last month

Acq. date: 2026-01-26