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Browsing by Author "Hentz, S."

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    Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI

    Claes, Gert
    ;
    Van Hoof, Rita  
    ;
    Du Bois, Bert  
    ;
    Van Barel, Greg
    ;
    Stoffels, Steve  
    ;
    Decoutere, Stefaan  
    Proceedings paper
    2008, Eurosensors XXII, 7/09/2008, p.831-834

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