Publication:
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1910 since deposited on 2021-10-17
1last month
Acq. date: 2026-08-06
Citations
Statistics
Views
1910 since deposited on 2021-10-17
1last month
Acq. date: 2026-08-06
Citations