Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Publication:
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Date
2008
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16375.pdf
557.44 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, Gert
;
Van Hoof, Rita
;
Du Bois, Bert
;
Van Barel, Greg
;
Stoffels, Steve
;
Decoutere, Stefaan
;
Nguyen, V.
;
Hentz, S.
;
Robert, P.
;
Celis, Jean-Pierre
;
Witvrouw, Ann
Journal
Abstract
Description
Metrics
Views
1906
since deposited on 2021-10-17
415
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1906
since deposited on 2021-10-17
415
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations