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Browsing by Author "Her, Youngjun"

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    Publication

    Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study

    Van Bel, Julie  
    ;
    Verstraete, Lander  
    ;
    Suh, Hyo Seon  
    ;
    Bezard, Philippe  
    ;
    Moussa, Alain  
    Journal article
    2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 043001

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