Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study

Publication:

2024

Journal article

Author(s)

;

;

;

;

;

;

;

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

123 since deposited on 2025-01-09

Acq. date: 2026-02-24