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Browsing by Author "Heringa, Anco"

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    CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges

    Dachs, Charles
    ;
    Surdeanu, Radu
    ;
    Pawlak, Bartek  
    ;
    Doornbos, Gerben  
    ;
    Duffy, R.
    ;
    Heringa, Anco
    Proceedings paper
    2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.15-22

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