Browsing by Author "Herzog, H.-J."

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Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

Mantl, S.
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Holländer, B.
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Hüging, N.
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Luysberg, M.
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Lenk, St.
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Hogg, S.M.
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Herzog, H.-J.
;
Hackbarth, T.
Oral presentation
2003, 12th EURO-CVD Workshop
Strained silicon SiGe HFETs for microwave applications

König, U.
;
Herzog, H.-J.
;
Aniel, F.
;
Kasper, E.
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De Meyer, Kristin
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Rabe, W.J.
;
Schumacher, H.
Oral presentation
2003, 33rd European Microwave Conference (EuMC)