Browsing by Author "Herzog, H.J."

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Strain relaxation of pseudomorphic Si1-xGe/Si(100) heterostructures after Si+ ion implantation

Holländer, B.
;
Buca, D.
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Mörschbächer, M.
;
Lenk, St.
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Mantl, S.
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Herzog, H.J.
;
Hackbarth, Th.
;
Loo, Roger
Journal article
2004, Journal of Applied Physics, (96) 3, p.1745-1747
Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation

Holländer, B.
;
Buca, D.M.
;
Lenk, S.
;
Mantl, S.
;
Herzog, H.J.
;
Hackbarth, T.
;
Loo, Roger
;
Caymax, Matty
Oral presentation
2004, 14th International Conference on Ion Beam Modification of Materials - IBMM
Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing

Mantl, S.
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Holländer, B.
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Hüging, N.
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Luysberg, M.
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Lenk, S.
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Hogg, S.M.
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Herzog, H.J.
;
Hackbarth, T.
Meeting abstract
2003, Abstracts Book ICSI3: 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, 9/03/2003, p.117