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Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation
Publication:
Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Holländer, B.
;
Buca, D.M.
;
Lenk, S.
;
Mantl, S.
;
Herzog, H.J.
;
Hackbarth, T.
;
Loo, Roger
;
Caymax, Matty
;
Mörschbächer, M.
;
Fichtner, P.F.P.
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1991
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1991
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations