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Browsing by Author "Higuchi, A."

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    Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment

    Iwasaki, A,
    ;
    Higuchi, A.
    ;
    Komori, K.
    ;
    Sato, M.
    ;
    Kesters, Els  
    ;
    Le, Quoc Toan  
    ;
    Holsteyns, Frank  
    Proceedings paper
    2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.223-226

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