Browsing by Author "Higuchi, A."
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Publication Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134261G-1-134261G-7Publication Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.223-226