Publication:

Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3050810

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Author(s)

Bogdanowicz, Janusz

;

Mingardi, Andrea

;

Brissonneau, Vincent

;

;

Shimura, Yosuke

;

;

Puttarame Gowda, Pallavi

;

;

Horiguchi, Naoto

;

Biesemans, Serge

;

;

;

;

;

Leray, Philippe

;

Charley, Anne-Laure

Journal

Proceedings of SPIE

Metrics

42 since deposited on 2025-07-28

5last month

1last week

Acq. date: 2026-01-06