Browsing by Author "Hillmann, Frank"
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Publication Reliable sub-nanometer repeatability for CD metrology in a reticle production environment
;Hourd, Andrew ;Grimshaw, Anthony ;Scheuring, Gerd ;Gittinger, ChristianDöbereiner, StefanProceedings paper2002-12, 22nd Annual BACUS Symposium on Photomask Technology, 3/10/2002, p.319-342