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Browsing by Author "Hillmann, Frank"

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    Reliable sub-nanometer repeatability for CD metrology in a reticle production environment

    Hourd, Andrew
    ;
    Grimshaw, Anthony
    ;
    Scheuring, Gerd
    ;
    Gittinger, Christian
    ;
    Döbereiner, Stefan
    Proceedings paper
    2002-12, 22nd Annual BACUS Symposium on Photomask Technology, 3/10/2002, p.319-342

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