Publication:

Reliable sub-nanometer repeatability for CD metrology in a reticle production environment

Date

2002-12

Proceedings Paper

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Author(s)

;

Grimshaw, Anthony

;

Scheuring, Gerd

;

Gittinger, Christian

;

Döbereiner, Stefan

;

Hillmann, Frank

;

Brück, Hans-Jürgen

;

Chen, Shiuh-Bin

;

;

Jonckheere, Rik

;

Philipsen, Vicky

;

;

Ordynskyy, Vladimir

;

;

Schätz, Thomas

;

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