Browsing by Author "Hinnen, Paul"
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Publication 3D features measurement using YieldStar, an angle resolved polarized scatterometer
Proceedings paper2011, Metrology, Inspection, and Process Control XXV, 27/02/2011, p.79712EPublication A single metrology tool solution for complete exposure tool setup
; ; ; ; Publication Focus and dose de-convolution technique for improved CD-control of immersion clusters
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