Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Hirae, S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Removal of small (<100-nm) particles and metal contamination in single-wafer cleaning tool

    Eitoku, Atsuro
    ;
    Snow, Jim
    ;
    Vos, Rita  
    ;
    Sato, M.
    ;
    Hirae, S.
    ;
    Nakajima, K.
    ;
    Nonomura, M.
    ;
    Imai, M.
    Proceedings paper
    2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.157-161

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings