Browsing by Author "Hoeks, M."
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Publication SLM device for 193 nm lithographic applications
;Lauria, John ;Albright, R. ;Vladimirsky, O. ;Hoeks, M. ;Vanneer, R. ;van Drieenhuizen, B.Chen, L.Journal article2009, Microelectronic Engineering, (86) 4_6, p.569-572