Browsing by Author "Hoffman, M."
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Publication Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Proceedings paper2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.23-30Publication Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Meeting abstract2001, 200th Meeting of the Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device Manufac, 2/09/2001Publication Removal of submicrometer particles from silicon wafer surfaces using HF-based cleaning mixtures
Journal article2001, Journal of the Electrochemical Society, (148) 12, p.G683-G691