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Browsing by Author "Hogg, S.M."

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    Dose dependent phenomena arising from implantation of Er into Si

    Hogg, S.M.
    ;
    Pipeleers, B.
    ;
    Vantomme, Andre  
    ;
    Bender, Hugo  
    ;
    Richard, Olivier  
    ;
    Swart, M.
    Journal article
    2005, J. Applied Physics, (97) 8, p.083514-1-083514-8
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    Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

    Mantl, S.
    ;
    Holländer, B.
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    Hüging, N.
    ;
    Luysberg, M.
    ;
    Lenk, St.
    ;
    Hogg, S.M.
    ;
    Herzog, H.-J.
    ;
    Hackbarth, T.
    Oral presentation
    2003, 12th EURO-CVD Workshop
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    Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing

    Mantl, S.
    ;
    Holländer, B.
    ;
    Hüging, N.
    ;
    Luysberg, M.
    ;
    Lenk, S.
    ;
    Hogg, S.M.
    ;
    Herzog, H.J.
    ;
    Hackbarth, T.
    Meeting abstract
    2003, Abstracts Book ICSI3: 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, 9/03/2003, p.117

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