Browsing by Author "Hogg, S.M."
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Publication Dose dependent phenomena arising from implantation of Er into Si
Journal article2005, J. Applied Physics, (97) 8, p.083514-1-083514-8Publication Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
;Mantl, S. ;Holländer, B. ;Hüging, N. ;Luysberg, M. ;Lenk, St. ;Hogg, S.M. ;Herzog, H.-J.Hackbarth, T.Oral presentation2003, 12th EURO-CVD WorkshopPublication Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing
;Mantl, S. ;Holländer, B. ;Hüging, N. ;Luysberg, M. ;Lenk, S. ;Hogg, S.M. ;Herzog, H.J.Hackbarth, T.Meeting abstract2003, Abstracts Book ICSI3: 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, 9/03/2003, p.117