Browsing by Author "Hollander, Bernd"

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Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates

Huging, Norbert
;
Luysberg, Martina
;
Urban, Knut
;
Buca, Dan
;
Hollander, Bernd
;
Mantl, Siegfried
Proceedings paper
2005, Nanoelectronic Days 2005, 9/02/2005
The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices

Mantl, S.
;
Buca, Dan
;
Hollander, Bernd
;
Trinkaus, Helmut
;
Hueging, Norbert
;
Luysberg, Martina
Proceedings paper
2005, MRS Fall Meeting Symposium OO: Growth, Modification, and Analysis by Ion Beams at the Nanoscale, 28/11/2005