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Browsing by Author "Hollink, Thijs"

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    Single exposure EUV patterning for BEOL metal layers on the imec iN7 platform

    Blanco, Victor  
    ;
    Bekaert, Joost  
    ;
    Mao, Ming  
    ;
    Kutrzeba Kotowska, Bogumila  
    ;
    Lariviere, Stephane  
    Proceedings paper
    2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.1014318

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