Browsing by Author "Holtzer, Nicolas"
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Publication Low damage ULK etching by means of high boiling point organic condensation
;Chanson, Romain ;Holtzer, Nicolas ;Lefaucheux, Philippe ;Dussart, RémiSHEN, PengMeeting abstract2017, Materials Research Society Spring Meeting, 17/04/2017, p.ED9.3.03