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Browsing by Author "Holtzer, Nicolas"

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    Low damage ULK etching by means of high boiling point organic condensation

    Chanson, Romain
    ;
    Holtzer, Nicolas
    ;
    Lefaucheux, Philippe
    ;
    Dussart, Rémi
    ;
    SHEN, Peng
    Meeting abstract
    2017, Materials Research Society Spring Meeting, 17/04/2017, p.ED9.3.03

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