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Browsing by Author "Hong, Eun Kee"

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    An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices

    Hong, Eun Kee
    ;
    Demuynck, Steven  
    ;
    Le, Quoc Toan  
    ;
    Baklanov, Mikhaïl
    ;
    Carbonell, Laure
    Journal article
    2007, Microelectronic Engineering, (84) 11, p.2582-2586

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