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An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
Publication:
An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
Date
2007
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hong, Eun Kee
;
Demuynck, Steven
;
Le, Quoc Toan
;
Baklanov, Mikhaïl
;
Carbonell, Laure
;
Van Hove, Marleen
;
Meynen, Herman
Journal
Microelectronic Engineering
Abstract
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1945
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1945
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations