An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices

dc.contributor.author	Hong, Eun Kee
dc.contributor.author	Demuynck, Steven
dc.contributor.author	Le, Quoc Toan
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.author	Carbonell, Laure
dc.contributor.author	Van Hove, Marleen
dc.contributor.author	Meynen, Herman
dc.contributor.imecauthor	Demuynck, Steven
dc.contributor.imecauthor	Le, Quoc Toan
dc.contributor.orcidimec	Le, Quoc Toan::0000-0002-0206-6279
dc.date.accessioned	2021-10-16T16:42:11Z
dc.date.available	2021-10-16T16:42:11Z
dc.date.embargo	9999-12-31
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12304
dc.source.beginpage	2582
dc.source.endpage	2586
dc.source.issue	11
dc.source.journal	Microelectronic Engineering
dc.source.volume	84
dc.title	An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
dc.type	Journal article
dspace.entity.type	Publication
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