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    Demonstration of a submicron damascene Cu/low-k mechanical sensor to monitor stress in BEOL metallisation

    Wilson, Chris  
    ;
    Croes, Kristof  
    ;
    Tokei, Zsolt  
    ;
    Beyer, Gerald  
    ;
    Horsfall, Horsfall
    Proceedings paper
    2009, IEEE International Conference on Microelectronic Test Structures - ICMTS, 30/03/2009, p.31-35

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