Publication:
Demonstration of a submicron damascene Cu/low-k mechanical sensor to monitor stress in BEOL metallisation
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1806 since deposited on 2021-10-18
3last month
Acq. date: 2026-10-12
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Views
1806 since deposited on 2021-10-18
3last month
Acq. date: 2026-10-12
Citations