Browsing by Author "Hoyer, R."
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Publication Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications
;Pawlak, Malgorzata ;Menou, Nicolas ;Wang, Xin Peng ;Dilliway, G. ;Pierreux, D.Fischer, P.Oral presentation2008, MRS Spring Meeting Symposium H: Materials Science of High-k Dielectric Stacks