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Browsing by Author "Hoyer, R."

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    Publication

    Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications

    Pawlak, Malgorzata
    ;
    Menou, Nicolas
    ;
    Wang, Xin Peng
    ;
    Dilliway, G.
    ;
    Pierreux, D.
    ;
    Fischer, P.
    Oral presentation
    2008, MRS Spring Meeting Symposium H: Materials Science of High-k Dielectric Stacks

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