Publication:
Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications
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1995 since deposited on 2021-10-17
2last month
Acq. date: 2025-12-08
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Metrics
Views
1995 since deposited on 2021-10-17
2last month
Acq. date: 2025-12-08
Citations