Publication:
Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications
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1997 since deposited on 2021-10-17
Acq. date: 2026-02-24
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Statistics
Views
1997 since deposited on 2021-10-17
Acq. date: 2026-02-24
Citations