Browsing by Author "Hoyer, Ronald"
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Publication Acoustic cleaning in nano-electronics
Proceedings paper2008, Acoustics, 29/06/2008, p.556-560Publication How much rear side polishing is required? A study on the impact of rear side polishing in PERC solar cells
Proceedings paper2012, 27th European Photovoltaic Solar Energy Conference and Exhibition - EUPVSEC, 24/09/2012, p.561-566Publication Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions
; ; ; ; ; Proceedings paper2008, 7th International Semiconductor Technology Conference - ISTC, 15/03/2008, p.436-446Publication Ultra low concentration clean: a new approach to feol critical wafer surface cleaning
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.167-174