Browsing by Author "Hsia, Jeff"
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Publication AI-enabled cross-domain image analysis for high-NA via defect quantification in random logic via arrays
Proceedings paper2026, Metrology, Inspection, and Process Control XL;, 2026-02-22, p.139811VPublication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550OPublication Unsupervised Pattern Classification for Dual-Layer EPE Characterization in Advanced Logic Devices