Browsing by Author "Huang, Ching-Chung"

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Dry resist process development toward depth of focus improvement in high NA EUV lithography

Huang, Ching-Chung
;
Haider, Ali
;
Chen, Zhengtao
;
Gullo, Francesco
;
Brouri, Mohand
Journal article
2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.021205
Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography

Rathore, Ashish
;
Cipriani, Maicol
;
Huang, Ching-Chung
;
Amiaud, Lionel
;
Dablemont, Celine
Journal article
2021, PHYSICAL CHEMISTRY CHEMICAL PHYSICS, (23) 15, p.9228-9234